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초록
TiO2 thin films were deposited on glass and polymer insulator substrates as the self-cleaning coating of polymer insulator. TiO2 films were deposited with various RF powers by unbalanced RF magnetron sputtering method with TiO2 ceramic target. We have investigated the tribological, structural, and electrical properties of TiO2 films deposited prepared with various RF powers. As a result, the hardness and elastic modulus values of TiO2 films increased with the increase of RF power. The surface roughness and contact angle values increased with the increasing RF power. Also, the rms leakage current of TiO2 films exhibited low values as the insulator layer. The TiO2 films fabricated in this work are suitable for the protection of polymer insulator because of the low leakage current and the good tribological properties.
- 제목
- Tribological and electrical properties of TiO2 thin films for polymer insulator as the dielectric coating of electric railroad
- 저자
- 정호성; 박철민; 이재형; 박용섭
- 발행일
- 2013-06-27
- 학회명
- IFFM 2013