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초록
The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H2) and methane (CH4) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.
키워드
Carbon based nanomaterial; Carbon nanowall; Microwave plasma enhanced vapor deposition; Carbon electrode; Growth time
- 제목
- Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode
- 제목 (타언어)
- Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode
- 저자
- 김성윤; 신승권; 김형철; 정연호; 강현일; 최원석; 권기백
- 발행일
- 2015-08
- 권
- 16
- 호
- 4
- 페이지
- 198 ~ 200
- 언어
- ENG
- 출판사
- 한국전기전자재료학회
- 발행국가
- 미국
- 분량
- 3 페이지
- ISSN
- E 2092-7592
P 1229-7607