전기철도 집전판 응용을 위한 Ti 나노금속 함량에 따른 나노결정 탄소박막의 물리적, 전기적 특성

초록

In this work, we have fabricated the nanocrystalline carbon films by using unbalanced magnetron sputtering method with graphite and Ti targets for contact strip application of electrical railway. The power density of graphite target was fixed and the power density was increased for the increase of Ti concentraion in TiC films. We investigated the hardness, surface roughness, contact angle, resitivity, HRTEM and XPS of TiC films with Ti concentration. The hardness and resistivity were improved with increasing Ti concentration. These results indicate that the improvement of hardness and resistivity is related to the increase of sp2 clusters in TiC films.

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