PREPARATION OF PB(ZR,TI)O3 FILMS DEPOSITED ON ITO COATED GLASS SUBSTRATE

초록

Pb(Zr,Ti)O3 (PZT) thin films have been successfully deposited on the corning glass (1737) and Indium Tin Oxide (ITO) coated 150 nm glass substrates with a RF magnetron sputtering. In order to obtain crystallization in the perovskite phase, the samples were annealed at 600-700℃ for 10 min. The ferroelectric characteristics of PZT thin films annealed at 650℃ for 10 minutes and deposited on the ITO coated glass substrates were like these, remanent polarizations were 15.8 ?C/cm2, coercive fields were 100 kV/cm, and remanent polarizations were decreased by 10% after 109 cycles, respectively.