Optical Properties of Columnar Structure of ZnO Thin Films Prepared by RF Magnetron sputtering Method

초록

We investigated the optical properties of columnar structure zinc oxide (ZnO) films according to the growth angles for anti-reflection coating of solar cells. We synthesized columnar structure Zno films on glass substrates using RF magenetron sputtering with a pure Zno target. Field emission scanning electton microscopy (FE-SEM) was applied to the growth angles of ZnO films, controlled at 0, 15, 100 nm thick to confirm the growth mechanism of the columnar structured glass substract. X-ray diffriaciton (XRD) was used to measure the grain sizes of the ZnO films.