Characteristics of N doped DLC films prepared by unbalanced magnetron sputtering method for electronic devices

초록

Diamond, synthetic diamond-like carbon (DLC), and allows carbon based materials to be used mainly for cutting tool coating, and as an abrasive material. Furthermore, the market for DLC has expanded widely into electronics, optics and acoustics, due to their distinct electrical and optical properties. In this work, N doped DLC (N:DLC) films were deposited on p-type silicon substrate by using a unbalanced magnetron sputtering (UBMS) method. We investigated the N effect with variation of working pressure on microstructure and electrical properties of N doped DLC films. The structural properties of N:DLC films were investigated by Raman spectroscopy and SEM-EDX., The electrical properties of films were investigated, by the change of resistivity and current-voltage (I-V) properties. The N:DLC films prepared by UBMS system in this study demonstrated good conducting properties, and also good physical properties with N doping.