Thickness effects of TiC interlayer on tribological properties of DLC prepared by UBM sputtering method

초록

We investigated the tribological properties of diamond-like carbon (DLC) films prepared with TiC interlayer of various thicknesses as the adhesive layer. DLC and TiC thin films were prepared using unbalanced magnetron (UBM) sputtering method using graphite and titanium as targets. TiC films as the interlayer were deposited under DLC films and various physical, tribological, and structural properties of the films fabricated with various TiC interlayer thickness were investigated With TiC interlayer under DLC films, the tribological properties of films were improved with increasing thickness and the DLC/TiC layer fabricated by UBM sputtering method are exhibited maximum high hardness over 29 GPa and high elastic modulus over 235 GPa, and a smooth surface below 0.8 nm.