기능성 나노코팅 박막의 열처리 분위기에 따른 특성분석 및 오염방지 태양광 모듈제작

초록

We investigated that effects of annealing ambient on the characteristics of functional nano thin film synthesized on glass substrate. The functional nano thin films were annealed by using rapid thermal annealing (RTA) equipment in vacuum, oxygen and nitrogen ambient, respectively. The hardness of the functional nano thin films were measured by a standard hardness testing method (ASTM D3363) such as a H-9H, F, HB and B-6B pencil (Mitsubishi, Japan). Also, the adhesion of the functional nano thin films were measured by a standard adhesion testing method (ASTM D3359) using scotch tape (3M, Korea). The contact angle of the functional nano thin films was measured by a contact angle analyzer (Phoenix 300 Touch, S.E.O.). The optical property of functional nano thin films was measured via UV-visible spectroscopy (S-3100, Scinco).

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